ALEXANDRIA, Va., May 26 -- United States Patent no. 12,636,597, issued on May 26, was assigned to SEMES Co. LTD. (Cheonan-si, South Korea).
"Equipment for treating substrate including a chemical solution supply apparatus with pump member and extraction nozzle" was invented by A Rah Cho (Daejeon, South Korea), Woo Sin Jung (Cheonan-si, South Korea), Hae Kyung Kim (Cheonan-si, South Korea) and Dae Sung Kim (Cheonan-si, South Korea).
According to the abstract* released by the U.S. Patent & Trademark Office: "Provided is an equipment for treating a substrate. The substrate treating equipment may include: a nozzle supplying a chemical solution to a substrate; and a chemical solution supply apparatus supplying the chemical solution to the nozzl...