ALEXANDRIA, Va., May 19 -- United States Patent no. 12,629,714, issued on May 19, was assigned to Semes Co. LTD. (Cheonan-si, South Korea).
"Substrate treating apparatus and substrate treating method" was invented by Yun Sang Kim (Seongnam-si, South Korea), Yoon Seok Choi (Suwon-si, South Korea), Young Dae Chung (Incheon, South Korea), Soon-Cheon Cho (Pyeongtaek-si, South Korea) and Se Hoon Oh (Cheonan-si, South Korea).
According to the abstract* released by the U.S. Patent & Trademark Office: "Provided are a substrate treating apparatus and a substrate treating method. The substrate treating apparatus includes: a chamber for providing a processing space; a substrate support unit provided in the processing space to support a substrate and...