ALEXANDRIA, Va., May 19 -- United States Patent no. 12,630,918, issued on May 19, was assigned to Semes Co. Ltd. (Chungcheongnam-do, South Korea).
"Consumable component treating apparatus and semiconductor manufacturing equipment" was invented by Sun Il Kim (Chungcheongnam-do, South Korea).
According to the abstract* released by the U.S. Patent & Trademark Office: "Provided is a consumable component treating apparatus for ensuring coating thickness uniformity and a semiconductor manufacturing equipment including the same. The consumable component treating apparatus comprises a housing; a process gas providing unit for providing process gas to an interior of the housing; a plasma generating unit including a high-frequency power source and ...