ALEXANDRIA, Va., May 19 -- United States Patent no. 12,635,444, issued on May 19, was assigned to SEMES Co. LTD. (Chungcheongnam-Do, South Korea).
"Apparatus for treating substrate and method for treating substrate" was invented by Yong Hyun Choi (Cheonan-si, South Korea), Young Hun Lee (Cheonan-si, South Korea), Yong Joon Im (Yongin-si, South Korea), Seung Hoon Oh (Cheonan-si, South Korea), Tae Jong Choi (Anyang-si, South Korea), Yong Sun Ko (Suwon-si, South Korea), Sang Min Lee (Seoul, South Korea) and Jin Woo Jung (Cheonan-si, South Korea).
According to the abstract* released by the U.S. Patent & Trademark Office: "Disclosed is an apparatus for treating a substrate. The apparatus for treating the substrate includes a liquid treating ch...