US Patent Issued to Semes on March 31 for "Transfer unit and substrate treatment apparatus including the same" (South Korean Inventor)

ALEXANDRIA, Va., March 31 -- United States Patent no. 12,593,653, issued on March 31, was assigned to Semes Co. Ltd. (Chungcheongnam-do, South Korea).

"Transfer unit and substrate treatment apparatus including the same" was invented by Duk Hyun Son (Cheonan-si, South Korea).

According to the abstract* released by the U.S. Patent & Trademark Office: "Provided are a transfer unit and a substrate treatment apparatus which can stably vacuum-adsorb a substrate and can be used for a long time. The transfer unit includes: a robot arm; and an end effector connected to the robot arm, wherein the end effector includes: a body; a vacuum hole formed in the body; and a pad installed on the body to surround the vacuum hole and including a first pad lay...