ALEXANDRIA, Va., March 31 -- United States Patent no. 12,593,649, issued on March 31, was assigned to Semes Co. Ltd. (Chungcheongnam-do, South Korea).
"Apparatus and method for treating substrate" was invented by Jun Young Choi (Cheongju-si, South Korea), Gui Su Park (Cheonan-si, South Korea), Young Jin Jang (Cheonan-si, South Korea) and Jun Hyun Lim (Seoul, South Korea).
According to the abstract* released by the U.S. Patent & Trademark Office: "The inventive concept provides a substrate treating apparatus. The substrate treating apparatus includes a treating bath having an accommodation space for accommodating a treating liquid; a support member configured to support at least one substrate in a vertical posture at the accommodation spac...