US Patent Issued to Semes on March 3 for "Method and equipment for leakage testing of electrostatic chuck" (South Korean Inventors)

ALEXANDRIA, Va., March 3 -- United States Patent no. 12,566,100, issued on March 3, was assigned to Semes Co. LTD. (Cheonan-si, South Korea).

"Method and equipment for leakage testing of electrostatic chuck" was invented by Da-Som Bae (Seoul, South Korea), Kyeong Hee Kang (Hwaseong-si, South Korea), Young Ran Ko (Daegu, South Korea) and Mi Young Jo (Hwaseong-si, South Korea).

According to the abstract* released by the U.S. Patent & Trademark Office: "The present invention provides a method for leakage testing of an electrostatic chuck. The method for leakage testing of an electrostatic chuck comprises: a mounting step of mounting the electrostatic chuck on a test stage of a testing chamber; a loading step of loading a dummy substrate in a...