ALEXANDRIA, Va., March 24 -- United States Patent no. 12,585,190, issued on March 24, was assigned to SEMES Co. LTD. (Cheonan-si, South Korea).
"Liquid chemical supply apparatus and liquid chemical supply system" was invented by Young Jun Son (Cheonan-si, South Korea), Woo Sin Jung (Cheonan-si, South Korea), Youngun Yun (Asan-si, South Korea) and Jung Suk Goh (Hwaseong-si, South Korea).
According to the abstract* released by the U.S. Patent & Trademark Office: "A liquid chemical supply apparatus for supplying a liquid chemical to a plurality of substrate processing apparatuses disposed at different heights includes a pump for providing a hydraulic pressure for moving the liquid chemical to the substrate processing apparatuses, a plurality...