ALEXANDRIA, Va., March 24 -- United States Patent no. 12,588,453, issued on March 24, was assigned to SEMES Co. LTD. (Cheonan-si, South Korea).
"Apparatus for treating substrate and related manufacturing method" was invented by Young Jun Son (Cheonan-si, South Korea).
According to the abstract* released by the U.S. Patent & Trademark Office: "A substrate treating apparatus includes a housing having an inner space; a support positioned in the inner space and configured to support a substrate; a treating container having a treating space therein and surrounding the supported substrate. A cleaning unit may supply a liquid to the substrate supporting on the support and a heating unit may heat a fluid that is supplied to the treating space to ...