US Patent Issued to SEMES on March 17 for "Bake unit, operation method thereof, and photo spinner equipment having the bake unit" (South Korean Inventors)

ALEXANDRIA, Va., March 17 -- United States Patent no. 12,578,649, issued on March 17, was assigned to SEMES Co. LTD. (Cheonan-si, South Korea).

"Bake unit, operation method thereof, and photo spinner equipment having the bake unit" was invented by Kyung Taek Im (Cheonan-si, South Korea) and Ji Yoon Chung (Cheonan-si, South Korea).

According to the abstract* released by the U.S. Patent & Trademark Office: "Proposed is a bake unit capable of rapid thermal treatment, an operation method of the bake unit, and photo spinner equipment. The bake unit that performs a thermal process on a substrate in the photo spinner equipment includes a heater for heating the substrate, a chiller for cooling the substrate, a substrate transfer robot for transfe...