US Patent Issued to SEMES on June 9 for "Supporting unit and substrate treating apparatus including the same" (South Korean Inventors)

ALEXANDRIA, Va., June 9 -- United States Patent no. 12,652,989, issued on June 9, was assigned to SEMES Co. LTD. (Cheonan-si, South Korea).

"Supporting unit and substrate treating apparatus including the same" was invented by Kang Seop Yun (Cheonan-si, South Korea), Chul Goo Kim (Sejong-si, South Korea), Jung Bong Choi (Suwon-si, South Korea) and Soo Han Song (Goyang-si, South Korea).

According to the abstract* released by the U.S. Patent & Trademark Office: "The inventive concept provides a substrate support unit comprising a chuck supporting and rotating a substrate; and a lamp unit provided below the substrate to heat the substrate, wherein the lamp unit comprises a first lamp having a reflective layer on the surface thereof, to block ...