US Patent Issued to SEMES on June 9 for "Substrate processing apparatus" (South Korean Inventors)

ALEXANDRIA, Va., June 9 -- United States Patent no. 12,649,174, issued on June 9, was assigned to SEMES Co. LTD. (Cheonan-si, South Korea).

"Substrate processing apparatus" was invented by Jongdoo Lee (Cheonan-si, South Korea), Taejong Choi (Asan-si, South Korea), Juyeon Song (Sokcho-si, South Korea) and Sangmin Lee (Seoul-si, South Korea).

According to the abstract* released by the U.S. Patent & Trademark Office: "Provided is a substrate processing apparatus including a body having a substrate treatment space therein, a fluid supply unit configured to supply a treatment fluid to the substrate treatment space, a fluid exhaust line to exhaust the treatment fluid from the substrate treatment space, a clamp body configured to surround and fi...