US Patent Issued to SEMES on June 9 for "Method of controlling plasma processing apparatus and plasma processing apparatus" (South Korean Inventors)

ALEXANDRIA, Va., June 9 -- United States Patent no. 12,651,726, issued on June 9, was assigned to SEMES Co. LTD. (Chungcheongnam-Do, South Korea).

"Method of controlling plasma processing apparatus and plasma processing apparatus" was invented by Aixian Zhang (Chungcheongnam-do, South Korea), Jung Hwan Lee (Chungcheongnam-do, South Korea) and Min Keun Bae (Chungcheongnam-do, South Korea).

According to the abstract* released by the U.S. Patent & Trademark Office: "The present disclosure relates to a method of controlling a plasma processing apparatus, and a plasma processing apparatus for performing the method. According to one embodiment of the present disclosure, a method of controlling a plasma processing apparatus includes supplying po...