US Patent Issued to SEMES on June 9 for "Buffer chamber, substrate treating apparatus and substrate treating method" (South Korean Inventors)

ALEXANDRIA, Va., June 9 -- United States Patent no. 12,649,164, issued on June 9, was assigned to SEMES Co. LTD. (Cheonan-si, South Korea).

"Buffer chamber, substrate treating apparatus and substrate treating method" was invented by Jun Young Choi (Cheongju-si, South Korea), Gui Su Park (Cheonan-si, South Korea), Young Hun Lee (Cheonan-si, South Korea), Young Jin Jang (Cheonan-si, South Korea) and Jun Hyun Lim (Seoul, South Korea).

According to the abstract* released by the U.S. Patent & Trademark Office: "The inventive concept provides a substrate treating apparatus. The substrate treating apparatus includes a batch-type treating bath for treating a substrate in a batch-type manner; a single-type treating chamber for treating the substra...