ALEXANDRIA, Va., June 9 -- United States Patent no. 12,652,985, issued on June 9, was assigned to Semes Co. LTD. (Cheonan-si, South Korea).
"Apparatus for treating substrate" was invented by Mi So Park (Daejeon, South Korea), Young Hun Lee (Cheonan-si, South Korea), Young Seop Choi (Cheonan-si, South Korea) and Jin Woo Jung (Cheonan-si, South Korea).
According to the abstract* released by the U.S. Patent & Trademark Office: "The inventive concept provides a substrate treating apparatus. The substrate treating apparatus includes a chamber having an inner space therein; a fluid supply unit having a supply line configured to supply a treating fluid to the inner space and a fluid supply source configured to supply the treating fluid to the su...