US Patent Issued to SEMES on June 30 for "Substrate processing apparatus, operating method thereof, and photo spinner equipment" (South Korean Inventor)

ALEXANDRIA, Va., July 16 -- United States Patent no. 12,672,505, issued on June 30, was assigned to SEMES Co. LTD. (Cheonan-si, South Korea).

"Substrate processing apparatus, operating method thereof, and photo spinner equipment" was invented by Ho Jin Jang (Cheonan-si, South Korea).

According to the abstract* released by the U.S. Patent & Trademark Office: "Disclosure provides a substrate processing apparatus, an operating method thereof, and photo spinner equipment, the substrate processing apparatus being capable of preventing fumes of processing liquid from blocking a duct. The substrate processing apparatus supplying processing liquid to a substrate to perform processing includes a substrate support unit configured to support the sub...