US Patent Issued to SEMES on June 30 for "Apparatus and method of treating substrate" (South Korean Inventor)

ALEXANDRIA, Va., July 16 -- United States Patent no. 12,672,501, issued on June 30, was assigned to SEMES Co. LTD. (Chungcheongnam-Do, South Korea).

"Apparatus and method of treating substrate" was invented by Joo Jib Park (Chungcheongnam-do, South Korea).

According to the abstract* released by the U.S. Patent & Trademark Office: "Provided is an apparatus for treating a substrate, the apparatus including: an index module; and a treating module disposed adjacent to the index module and treating a substrate, in which the treating module includes: one or a plurality of process chambers; a transfer chamber provided with a main transfer robot for transferring a substrate to the process chamber; and a cleaning unit for cleaning a hand of the ma...