US Patent Issued to SEMES on June 23 for "Substrate treating apparatus and substrate treating method" (South Korean Inventors)

ALEXANDRIA, Va., July 15 -- United States Patent no. 12,665,170, issued on June 23, was assigned to SEMES Co. LTD. (Chungcheongnam-do, South Korea).

"Substrate treating apparatus and substrate treating method" was invented by Yoon Seok Choi (Chungcheongnam-do, South Korea), Yun Sang Kim (Chungcheongnam-do, South Korea), Youn Gun Bong (Chungcheongnam-do, South Korea), Jae Won Shin (Chungcheongnam-do, South Korea) and Jong Won Park (Chungcheongnam-do, South Korea).

According to the abstract* released by the U.S. Patent & Trademark Office: "A substrate treating apparatus is provided to provide heating and plasma treatment of a substrate in a single device, and the substrate treating apparatus includes a treatment container in which a substra...