US Patent Issued to Semes on June 23 for "Differential pressure measuring device and substrate treating facility including the same" (South Korean Inventor)

ALEXANDRIA, Va., July 15 -- United States Patent no. 12,663,328, issued on June 23, was assigned to Semes Co. Ltd. (Chungcheongnam-do, South Korea).

"Differential pressure measuring device and substrate treating facility including the same" was invented by Dong Hoon Kang (Bucheon-si, South Korea).

According to the abstract* released by the U.S. Patent & Trademark Office: "Provided is a substrate treating facility, including: an index module on which a substrate is loaded or unloaded; a treating module for performing a substrate treatment on the substrate loaded into the index module; a buffer chamber disposed between the index module and the treating module; and a differential pressure measuring device for measuring a differential pressur...