US Patent Issued to SEMES on June 16 for "Processing liquid providing apparatus and substrate treating system including the same" (South Korean Inventors)

ALEXANDRIA, Va., June 16 -- United States Patent no. 12,654,455, issued on June 16, was assigned to SEMES Co. LTD. (Chungcheongnam-do, South Korea).

"Processing liquid providing apparatus and substrate treating system including the same" was invented by Dai Geon Yoon (Chungcheongnam-do, South Korea), Soo Hong Lee (Gyeonggi-do, South Korea), Dong Hwa Lee (Chungcheongnam-do, South Korea), Ji Hyeon Kim (Chungcheongnam-do, South Korea), Sang Hwa Lee (Chungcheongnam-do, South Korea) and Dae Sung Kim (Chungcheongnam-do, South Korea).

According to the abstract* released by the U.S. Patent & Trademark Office: "Provided are an apparatus for providing a substrate processing liquid having an optimal structure in the correlation between securing inte...