US Patent Issued to Semes on June 16 for "Part cleaning apparatus and part cleaning method" (South Korean Inventor)

ALEXANDRIA, Va., June 16 -- United States Patent no. 12,654,208, issued on June 16, was assigned to Semes Co. Ltd. (Chungcheongnam-do, South Korea).

"Part cleaning apparatus and part cleaning method" was invented by Seongsoo Lee (Suwon-si, South Korea).

According to the abstract* released by the U.S. Patent & Trademark Office: "Provided is an apparatus for cleaning a part of a substrate processing apparatus, the apparatus including a chemical solution storage tank for storing a chemical solution, a filter configured to filter the chemical solution supplied from the chemical solution storage tank, a heater configured to heat the filtered chemical solution, and a vibrator arranged adjacent to the filter and configured to provide vibration t...