US Patent Issued to SEMES on July 7 for "Substrate treating apparatus" (South Korean Inventors)

ALEXANDRIA, Va., July 7 -- United States Patent no. 12,676,286, issued on July 7, was assigned to SEMES Co. Ltd. (Cheonan-si, South Korea).

"Substrate treating apparatus" was invented by Duk Hyun Son (Cheonan-si, South Korea) and Yu Ri Son (Busan, South Korea).

According to the abstract* released by the U.S. Patent & Trademark Office: "Disclosed is a substrate treating apparatus. The substrate treating apparatus includes a load lock chamber, of which a pressure of an interior space is changed between a first pressure and a second pressure that is lower than the first pressure, an index chamber connected to the load lock chamber, and a measurement unit that measures a level of particles in the interior space, and the measurement unit is lo...