US Patent Issued to Semes on July 7 for "Cooling unit, apparatus for processing a substrate and method of processing a substrate" (South Korean Inventors)

ALEXANDRIA, Va., July 7 -- United States Patent no. 12,677,624, issued on July 7, was assigned to Semes Co. Ltd. (Cheonan-si, South Korea).

"Cooling unit, apparatus for processing a substrate and method of processing a substrate" was invented by Jaeil Hyun (Cheonan-si, South Korea), Gihong Park (Cheonan-si, South Korea), Jaesung Ju (Cheonan-si, South Korea) and Jooyoung Lee (Cheonan-si, South Korea).

According to the abstract* released by the U.S. Patent & Trademark Office: "An apparatus for processing a substrate may include a heating plate configured to heat a substrate placed thereon, a cooling conveyor including a conveyor configured to transfer a heated substrate, and a first cooling part configured to cool the heated substrate while...