US Patent Issued to Semes on July 21 for "Sensor station, data acquisition method and substrate treating system" (South Korean Inventors)

ALEXANDRIA, Va., July 21 -- United States Patent no. 12,690,427, issued on July 21, was assigned to Semes Co. Ltd. (Chungcheongnam-do, South Korea).

"Sensor station, data acquisition method and substrate treating system" was invented by Sang Hyun Son (Busan, South Korea), Yong-Jun Seo (Hwaseong-si, South Korea), Su Jin Chae (Suwon-si, South Korea), Dong Ok Ahn (Anyang-si, South Korea) and Jae Hong Kim (Asan-si, South Korea).

According to the abstract* released by the U.S. Patent & Trademark Office: "The inventive concept provides a sensor station. The sensor station includes a body providing an inner space for storing a substrate-type sensor; a power source unit installed at the body and configured to transmit a power to the substrate-typ...