US Patent Issued to SEMES on July 21 for "Lift pin assembly and substrate processing apparatus having same" (South Korean Inventors)

ALEXANDRIA, Va., July 21 -- United States Patent no. 12,690,424, issued on July 21, was assigned to SEMES Co. LTD. (Cheonan-si, South Korea).

"Lift pin assembly and substrate processing apparatus having same" was invented by Kuk Saeng Kim (Yongin-si, South Korea), Jun Hyeak Choi (Seoul, South Korea), Wan Hee Jeong (Hwaseong-si, South Korea) and Do Youn Lim (Hwaseong-si, South Korea).

According to the abstract* released by the U.S. Patent & Trademark Office: "A substrate support unit includes a substrate support member that supports a substrate, the substrate support member being provided with one or more pin holes vertically penetrating the substrate support member, and a lift pin assembly provided to be lifted along a corresponding pin h...