US Patent Issued to SEMES on July 21 for "Irradiating module, and apparatus for treating substrate with the same" (South Korean Inventors)

ALEXANDRIA, Va., July 21 -- United States Patent no. 12,687,784, issued on July 21, was assigned to SEMES Co. LTD. (Cheonan-si, South Korea).

"Irradiating module, and apparatus for treating substrate with the same" was invented by Ki Hoon Choi (Cheonan-si, South Korea), Hyo Won Yang (Seoul, South Korea), Hyun Yoon (Hwaseong-si, South Korea), Tae Hee Kim (Yongin-si, South Korea), Won Sik Son (Yongin-si, South Korea) and In Ki Jung (Hwaseong-si, South Korea).

According to the abstract* released by the U.S. Patent & Trademark Office: "The inventive concept provides a substrate treating apparatus. The substrate treating apparatus includes a support unit configured to support and rotate a substrate at a treating space; a liquid supply unit con...