US Patent Issued to SEMES on Jan. 27 for "Wafer type measuring apparatus and magnetic flux density measuring method using the same" (South Korean Inventors)

ALEXANDRIA, Va., Jan. 28 -- United States Patent no. 12,535,520, issued on Jan. 27, was assigned to SEMES Co. LTD. (Chungcheongnam-do, South Korea).

"Wafer type measuring apparatus and magnetic flux density measuring method using the same" was invented by Yongjun Seo (Hwaseong-si, South Korea), Sujin Chae (Suwon-si, South Korea), Sanghyun Son (Busan-si, South Korea), Sangmin Ha (Hwaseong-si, South Korea), Youngsik Bang (Yongin-si, South Korea), Jeongmo Hwang (Ansan-si, South Korea) and Dongok Ahn (Anyang-si, South Korea).

According to the abstract* released by the U.S. Patent & Trademark Office: "Provided are a wafer-type measuring apparatus capable of accurately measuring the magnetic flux density in a process chamber without opening the...