US Patent Issued to Semes on Jan. 20 for "Apparatus for treating a substrate and electrostatic monitoring method of treatment liquid" (South Korean Inventors)

ALEXANDRIA, Va., Jan. 20 -- United States Patent no. 12,532,695, issued on Jan. 20, was assigned to Semes Co. LTD. (Chungcheongnam-do, South Korea).

"Apparatus for treating a substrate and electrostatic monitoring method of treatment liquid" was invented by Do Yeon Kim (Yongin-si, South Korea), Young Jun Son (Cheonan-si, South Korea), Tae Hoon Lee (Osan-si, South Korea), Sung-gyu Lee (Cheonan-si, South Korea) and Hyun Yoon (Seoul, South Korea).

According to the abstract* released by the U.S. Patent & Trademark Office: "Provided is an apparatus for treating a substrate. The substrate treating apparatus may include: a substrate support unit supporting a substrate; a nozzle supplying a liquid to the substrate supported on the substrate suppo...