US Patent Issued to SEMES on Jan. 13 for "Liquid supply unit, and substrate treating apparatus including the same" (South Korean Inventors)

ALEXANDRIA, Va., Jan. 13 -- United States Patent no. 12,521,771, issued on Jan. 13, was assigned to SEMES Co. LTD. (Chungcheongnam-Do, South Korea).

"Liquid supply unit, and substrate treating apparatus including the same" was invented by Jun Ho Song (Hwaseong-si, South Korea), Min Hee Cho (Suwon-si, South Korea) and Won Young Kang (Hwaseong-si, South Korea).

According to the abstract* released by the U.S. Patent & Trademark Office: "Provided is a liquid supply unit for supplying a treatment liquid to a nozzle that discharges the treatment liquid to a substrate, the liquid supply unit including: a tank for storing the treatment liquid; a main circulation line for supplying the treatment liquid from an internal space of the tank to the noz...