ALEXANDRIA, Va., Feb. 3 -- United States Patent no. 12,539,531, issued on Feb. 3, was assigned to SEMES Co. LTD. (Chungcheongnam-Do, South Korea).
"Apparatus for processing a substrate" was invented by Youngkyu Oh (Cheonan-si, South Korea).
According to the abstract* released by the U.S. Patent & Trademark Office: "An apparatus for processing a substrate may include a vacuum suction part including vacuum holes configured to apply a vacuum pressure to a rear face of a substrate while a predetermined process is performed on the substrate, and a cleaning part configured to clean the vacuum holes in a cleaning process of cleaning the vacuum holes. The cleaning part may include a cleaning solution supply part configured to provide a cleaning s...