US Patent Issued to SEMES on Feb. 17 for "Microwave providing apparatus, system including the same, and method of manufacturing semiconductor device" (South Korean Inventors)

ALEXANDRIA, Va., Feb. 17 -- United States Patent no. 12,556,152, issued on Feb. 17, was assigned to SEMES Co. LTD. (Cheonan-si, South Korea).

"Microwave providing apparatus, system including the same, and method of manufacturing semiconductor device" was invented by Yoonseok Choi (Suwon-si, South Korea), Hanlim Kang (Seoul-si, South Korea), Hyunwoo Jo (Hwaseong-si, South Korea) and Sangjeong Lee (Hwaseong-si, South Korea).

According to the abstract* released by the U.S. Patent & Trademark Office: "Provided is a system including a microwave source configured to generate microwaves, a branch apparatus including an input port connected to the microwave source, first and second chambers configured to process a wafer by using the microwaves, a...