US Patent Issued to SEMES on Feb. 17 for "Apparatus and method of processing substrate" (South Korean Inventors)

ALEXANDRIA, Va., Feb. 17 -- United States Patent no. 12,553,138, issued on Feb. 17, was assigned to SEMES Co. LTD. (Chungcheongnam-do, South Korea).

"Apparatus and method of processing substrate" was invented by Jee Young Lee (Chungcheongnam-do, South Korea), Won Geun Kim (Chungcheongnam-do, South Korea), Young Dae Chung (Chungcheongnam-do, South Korea), Ji Hoon Jeong (Chungcheongnam-do, South Korea), Tae Shin Kim (Chungcheongnam-do, South Korea) and Won Sik Son (Chungcheongnam-do, South Korea).

According to the abstract* released by the U.S. Patent & Trademark Office: "A method of processing a substrate includes an etchant supplying operation of supplying an etchant to a substrate; a puddle operation of, by rotating the substrate at a fi...