ALEXANDRIA, Va., Feb. 17 -- United States Patent no. 12,557,580, issued on Feb. 17, was assigned to SEMES Co. LTD. (Cheonan-si, South Korea).
"Apparatus and method for supplying processing liquid" was invented by Mu Hyeon Lee (Cheonan-si, South Korea).
According to the abstract* released by the U.S. Patent & Trademark Office: "A method for supplying processing liquid is configured to adjust the supply amount of silica by a processing liquid supply unit in order to improve a selectivity ratio in a substrate treatment process through the processing liquid, to mix processing liquid substances, to adjust the concentration and temperature of the processing liquid on the basis of a substrate processing condition to supply the processing liquid ...