ALEXANDRIA, Va., Feb. 11 -- United States Patent no. 12,550,661, issued on Feb. 10, was assigned to Semes Co. Ltd. (Chungcheongnam-do, South Korea).
"Apparatus for treating substrate" was invented by Tae Shin Kim (Suwon-si, South Korea), Young Dae Chung (Incheon, South Korea), Won-Geun Kim (Goyang-si, South Korea), Jee Young Lee (Suwon-si, South Korea) and Ji Hoon Jeong (Hwaseong-si, South Korea).
According to the abstract* released by the U.S. Patent & Trademark Office: "Provided is an apparatus for treating a substrate, which includes: a chamber having a treating space; a substrate support unit supporting and rotating a substrate in the treating space; a liquid supply unit supplying a chemical liquid to the substrate supported on the su...