US Patent Issued to SEMES on Dec. 30 for "Plasma processing apparatus and plasma control method using magnetic field" (South Korean Inventors)

ALEXANDRIA, Va., Dec. 31 -- United States Patent no. 12,512,305, issued on Dec. 30, was assigned to SEMES Co. LTD. (Chungcheongnam-do, South Korea).

"Plasma processing apparatus and plasma control method using magnetic field" was invented by Duk Hyun Son (Chungcheongnam-do, South Korea), Dong Mok Lee (Chungcheongnam-do, South Korea) and Hyung Joon Kim (Chungcheongnam-do, South Korea).

According to the abstract* released by the U.S. Patent & Trademark Office: "A plasma processing apparatus using a magnetic field includes a reaction chamber, a plasma generating device connected to the reaction chamber to generate plasma in the reaction chamber, a substrate support disposed in a lower portion in the reaction chamber to support a wafer to be ...