ALEXANDRIA, Va., Dec. 23 -- United States Patent no. 12,506,025, issued on Dec. 23, was assigned to SEMES Co. LTD. (Cheonan-si, South Korea).
"Susceptor and method of manufacturing the same" was invented by So Hyung Jiong (Cheonan-si, South Korea), Hyung Joon Kim (Pyeongtaek-si, South Korea) and Jong Gun Lee (Cheonan-si, South Korea).
According to the abstract* released by the U.S. Patent & Trademark Office: "A method of manufacturing a susceptor includes preparing an electrostatic chuck (ESC) and a base plate, each including a gas channel, preparing a bush-filter assembly disposed between the gas channel in the ESC and the gas channel in the base plate, and coupling the ESC to the base plate in such a manner that a portion of the bush-fi...