ALEXANDRIA, Va., Dec. 23 -- United States Patent no. 12,504,690, issued on Dec. 23, was assigned to Semes Co. Ltd. (Chungcheongnam-do, South Korea).
"Apparatus for treating substrate and method for treating a substrate" was invented by Ki Hoon Choi (Cheonan-si, South Korea), In Ki Jung (Hwaseong-si, South Korea), Hyo Won Yang (Seoul, South Korea), Sang Hyeon Ryu (Yangpyeong-gun, South Korea), Young Ho Park (Incheon, South Korea) and Tae Hee Kim (Yongin-si, South Korea).
According to the abstract* released by the U.S. Patent & Trademark Office: "The inventive concept provides a substrate treating apparatus. The substrate treating apparatus includes a housing having a treating space; a support unit configured to support and rotate a substra...