ALEXANDRIA, Va., Dec. 2 -- United States Patent no. 12,489,000, issued on Dec. 2, was assigned to SEMES Co. LTD. (Cheonan-si, South Korea).
"Apparatus for treating substrate and method for treating substrate" was invented by Min Ok Kang (Daejeon, South Korea), Young Il Lee (Chungcheongnam-do, South Korea) and Kyu Hwan Chang (Chungcheongnam-do, South Korea).
According to the abstract* released by the U.S. Patent & Trademark Office: "Provided is an apparatus for treating a substrate. In the exemplary embodiment, the apparatus for treating the substrate includes a support member configured to support a substrate and provided rotatably; a treating liquid nozzle configured to supply selectively a high-temperature first treating liquid and a hi...