US Patent Issued to Semes on Aug. 25 for "Substrate processing device" (South Korean Inventors)

ALEXANDRIA, Va., Aug. 25 -- United States Patent no. 12,719,028, issued on Aug. 25, was assigned to Semes Co. Ltd. (Chungcheongnam-do, South Korea).

"Substrate processing device" was invented by Hyoungkyu Son (Seoul-si, South Korea), Jaewoong Sim (Hwaseong-si, South Korea), Donguk Kim (Hwaseong-si, South Korea), Yunsang Kim (Seongnam-si, South Korea) and Inhoe Kim (Seoul-si, South Korea).

According to the abstract* released by the U.S. Patent & Trademark Office: "A substrate processing device is provided. The substrate processing device includes: a substrate supporter configured to support a substrate; a heating ring horizontally surrounding the substrate supporter; and an edge ring horizontally surrounding the heating ring and configured...