US Patent Issued to Semes on Aug. 25 for "Heater array and apparatus for processing a substrate including an heater array" (South Korean Inventors)

ALEXANDRIA, Va., Aug. 25 -- United States Patent no. 12,720,643, issued on Aug. 25, was assigned to Semes Co. Ltd. (Cheonan-si, South Korea).

"Heater array and apparatus for processing a substrate including an heater array" was invented by Chungwoo Lee (Suwon-si, South Korea), Sungyoun Jeon (Cheonan-si, South Korea), Inkyu Park (Gunpo-si, South Korea) and Yongseok Jang (Cheonan-si, South Korea).

According to the abstract* released by the U.S. Patent & Trademark Office: "An apparatus for processing a substrate may include a process chamber in which a desired process is performed, a supporting unit disposed in the process chamber, and a heater array disposed in the supporting unit. The heater array may include a plurality of heaters providi...