ALEXANDRIA, Va., Aug. 18 -- United States Patent no. 12,713,867, issued on Aug. 18, was assigned to SEMES Co. LTD. (Chungcheongnam-Do, South Korea).
"Substrate treating apparatus and substrate treating method" was invented by Kwang Sup Kim (Chungcheongnam-do, South Korea), Seung Un Oh (Chungcheongnam-do, South Korea), Shin Hwa Kang (Gyeonggi-do, South Korea), Sang Hyeon Ryu (Gyeonggi-o, South Korea) and Young Ho Park (Incheon, South Korea).
According to the abstract* released by the U.S. Patent & Trademark Office: "Disclosed is a substrate treating apparatus. The substrate treating apparatus includes a body including an irradiation end, from which laser light is irradiated, a shaft coupled to the body, and a driver that supplies power to ...