US Patent Issued to SEMES on Aug. 18 for "Inspecting apparatus and semiconductor manufacturing equipment including the same" (South Korean Inventors)

ALEXANDRIA, Va., Aug. 18 -- United States Patent no. 12,710,459, issued on Aug. 18, was assigned to SEMES Co. LTD. (Chungcheongnam-do, South Korea).

"Inspecting apparatus and semiconductor manufacturing equipment including the same" was invented by Hyo Seong Seong (Gyeongsangnam-do, South Korea), Tae Hoon Jo (Seoul, South Korea) and Soon Min Kwon (Gyeonggi-do, South Korea).

According to the abstract* released by the U.S. Patent & Trademark Office: "An inspecting apparatus capable of performing an inspection of equipment without destroying the equipment and semiconductor manufacturing equipment including the inspecting apparatus are provided. The inspecting apparatus includes: a measurement module measuring a first impedance at a first por...