US Patent Issued to SEMES on Aug. 11 for "Liquid supply unit having tank provided with circulation line, apparatus for treating substrate, including the same, and method of treating substrate" (South Korean Inventors)

ALEXANDRIA, Va., Aug. 12 -- United States Patent no. 12,702,998, issued on Aug. 11, was assigned to SEMES Co. LTD. (Cheonan-si, South Korea).

"Liquid supply unit having tank provided with circulation line, apparatus for treating substrate, including the same, and method of treating substrate" was invented by In Ryu Jeon (Cheonan-si, South Korea) and Mu Hyeon Lee (Cheonan-si, South Korea).

According to the abstract* released by the U.S. Patent & Trademark Office: "Disclosed is a method of treating a substrate, the method including: adjusting a temperature of a treatment liquid by heating the treatment liquid with a heater unit installed in the circulation line while circulating the treatment liquid in a housing of a tank through a circulat...