US Patent Issued to SEMES on April 14 for "Home port and a substrate-treating apparatus for exhausting fume from a treatment liquid" (South Korean Inventors)

ALEXANDRIA, Va., April 15 -- United States Patent no. 12,599,926, issued on April 14, was assigned to SEMES Co. LTD. (Chungcheongnam-Do, South Korea).

"Home port and a substrate-treating apparatus for exhausting fume from a treatment liquid" was invented by Jong Won Moon (Chungcheongnam-do, South Korea), Kyung Hun Lee (Chungcheongnam-do, South Korea), Eun Hyeok Choi (Chungcheongnam-do, South Korea) and Young Jin Kim (Chungcheongnam-do, South Korea).

According to the abstract* released by the U.S. Patent & Trademark Office: "Provided is a home port in which a nozzle supplying a treating liquid to a substrate waits. The home port includes a drain cup, a housing provided to cover the drain cup and having an exhaust space exhausting a fume ge...