ALEXANDRIA, Va., April 15 -- United States Patent no. 12,603,260, issued on April 14, was assigned to SEMES Co. LTD. (Chungcheongnam-Do, South Korea).
"Apparatus for treating substrate and method for treating substrate" was invented by Dong Uk Kim (Gyeonggi-do, South Korea), In Hoe Kim (Seoul, South Korea) and Hyoung Kyu Son (Seoul, South Korea).
According to the abstract* released by the U.S. Patent & Trademark Office: "The inventive concept provides a substrate treating apparatus. The substrate treating apparatus includes a chamber having an inner space; a separation unit provided at the inner space and configured to be combined with the chamber to divide the inner space into a plurality of treating spaces and a transfer space; a plural...