US Patent Issued to Semes, Seoul National University R&DB Foundation on June 23 for "Apparatus for supplying liquid and apparatus for treating substrate" (South Korean Inventors)

ALEXANDRIA, Va., July 15 -- United States Patent no. 12,663,720, issued on June 23, was assigned to Semes Co. Ltd. (Chungcheongnam-do, South Korea) and Seoul National University R&DB Foundation (Seoul, South Korea).

"Apparatus for supplying liquid and apparatus for treating substrate" was invented by Jung Suk Goh (Hwaseong-si, South Korea), A Rah Cho (Daejeon, South Korea), Woo Sin Jung (Cheonan-si, South Korea), Dae Sung Kim (Cheonan-si, South Korea), Hae Kyung Kim (Cheonan-si, South Korea), Hyungmin Park (Seoul, South Korea), Jungjin Lee (Seoul, South Korea), Linfeng Piao (Incheon, South Korea) and Jubeom Lee (Gimpo-si, South Korea).

According to the abstract* released by the U.S. Patent & Trademark Office: "Provided is a liquid supplyi...