US Patent Issued to SEMES, PUSAN NATIONAL UNIVERSITY INDUSTRY-UNIVERSITY COOPERATION FOUNDATION on July 15 for "Apparatus for treating substrate" (South Korean Inventors)

ALEXANDRIA, Va., July 16 -- United States Patent no. 12,362,147, issued on July 15, was assigned to SEMES Co. LTD (Chungcheongnam-Do, South Korea) and PUSAN NATIONAL UNIVERSITY INDUSTRY-UNIVERSITY COOPERATION FOUNDATION (Busan, South Korea).

"Apparatus for treating substrate" was invented by Sang Jeong Lee (Hwaseong-si, South Korea), Yoon Seok Choi (Suwon-si, South Korea), Sun Wook Jung (Hwaseong-si, South Korea), Ho-Jun Lee (Busan, South Korea) and Sang Woo Kim (Busan, South Korea).

According to the abstract* released by the U.S. Patent & Trademark Office: "An exemplary embodiment of the present invention provided an apparatus for treating a substrate. The apparatus for treating the substrate includes a process chamber having a treating ...