US Patent Issued to SEIKO EPSON on Oct. 20 for "Method for manufacturing vibrator element" (Japanese Inventors)

ALEXANDRIA, Va., Oct. 21 -- United States Patent no. 12,771,307, issued on Oct. 20, was assigned to SEIKO EPSON Corp. (Japan).

"Method for manufacturing vibrator element" was invented by Keiichi Yamaguchi (Ina, Japan), Hiyori Sakata (Shinagawa, Japan), Shigeru Shiraishi (Ina, Japan) and Ryuta Nishizawa (Nagano, Japan).

According to the abstract* released by the U.S. Patent & Trademark Office: "A method for manufacturing a vibrator element includes a first protective film forming step of forming a first protective film on a first substrate surface of a quartz crystal substrate, a first dry etching step of dry etching the quartz crystal substrate from a first substrate surface side to form a first groove and outer shapes of a first and seco...