US Patent Issued to SEIKO EPSON on May 19 for "Inertial sensor, method for manufacturing inertial sensor, and inertial measurement unit" (Japanese Inventor)

ALEXANDRIA, Va., May 19 -- United States Patent no. 12,631,665, issued on May 19, was assigned to SEIKO EPSON Corp. (Japan).

"Inertial sensor, method for manufacturing inertial sensor, and inertial measurement unit" was invented by Teruo Takizawa (Matsumoto, Japan).

According to the abstract* released by the U.S. Patent & Trademark Office: "An inertial sensor 1 includes: a base body; a lid body facing the base body; a functional element disposed in a cavity between the base body and the lid body and including a semiconductor layer; an adhesive layer disposed in a peripheral region surrounding the cavity and adhering the base body and the lid body to each other; and a sealer configured to seal a hole which communicates the cavity with an o...