US Patent Issued to SEIKO EPSON on Feb. 17 for "Physical quantity sensor, physical quantity sensor device, and inertial measurement unit" (Japanese Inventor)

ALEXANDRIA, Va., Feb. 17 -- United States Patent no. 12,553,918, issued on Feb. 17, was assigned to SEIKO EPSON Corp. (Japan).

"Physical quantity sensor, physical quantity sensor device, and inertial measurement unit" was invented by Satoru Tanaka (Chino, Japan).

According to the abstract* released by the U.S. Patent & Trademark Office: "A physical quantity sensor includes a substrate that has a first fixed electrode and a movable body that has a first mass portion facing the first fixed electrode. The first mass portion includes a first region, and a second region farther from the rotation axis than the first region, a first through-hole group is provided in the first region, and a second through-hole group is provided in the second regi...